Mark your selections and choose between table on screen and file format. Marking tips
For variables marked 
you need to select at least one value
Period
Kind of activity (NACE Rev. 2.)
Limiting factors
Number of selected data cells are:(maximum number allowed is 1 000 000)
Presentation on screen is limited to 200 000 rows and 50 000 columns
Number of selected cells exceeds the maximum allowed 1 000 000